Low Temperature Growth of Hydrogenated Silicon Prepared by PECVD from Argon Diluted Silane Plasma

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Crystal Structure Theory and Applications

ISSN Print: 2169-2491
ISSN Online: 2169-2505
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"Low Temperature Growth of Hydrogenated Silicon Prepared by PECVD from Argon Diluted Silane Plasma"
written by Rachid Amrani, Pascale Abboud, Larbi Chahed, Yvan Cuminal,
published by Crystal Structure Theory and Applications, Vol.1 No.3, 2012

has been cited by the following article(s):

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[9]	The effects of argon and helium dilution in the growth of nc-Si: H thin films by plasma-enhanced chemical vapor deposition
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[10]	Light‐Induced Reversible Optical Properties of Hydrogenated Amorphous Silicon: A Promising Optically Programmable Photonic Material
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[11]	Characterization and modeling of electrical transport in undoped hydrogenated microcrystalline silicon
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[12]	Plasma-deposited hydrogenated amorphous silicon films: multiscale modelling reveals key processes
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[13]	Nanostructure evolution of magnetron sputtered hydrogenated silicon thin films
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[14]	Improving Memory Characteristics of Hydrogenated Nanocrystalline Silicon Germanium Nonvolatile Memory Devices by Controlling Germanium Contents
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[15]	Mixed phase silicon thin films grown at high rate using 60MHz assisted VHF-PECVD technique
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[16]	Mixed phase silicon thin films grown at high rate using 60 MHz assisted VHF-PECVD technique
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[17]	Structural analysis of hydrogenated nanocrystalline silicon thin films as a function of substrate temperature during deposition
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[1]	Fast switching photodetector based on HfO2 thin film deposited using electron beam evaporation technique Applied Physics A, 2023 DOI:10.1007/s00339-023-06907-4

[2]	Fast switching photodetector based on HfO2 thin film deposited using electron beam evaporation technique Applied Physics A, 2023 DOI:10.1007/s00339-023-06907-4

[3]	Development and Characterization of SDS Doped Poly(aniline-co-2-isopropylaniline) MWCNT/CuO Nanocomposites for Electrochemical Supercapacitor Application Asian Journal of Chemistry, 2020 DOI:10.14233/ajchem.2020.22681

[4]	Local Surface Electric Field’s Effect on Adsorbed Proteins’ Orientation Surfaces, 2019 DOI:10.3390/surfaces2020030

[5]	Deposition of micro crystalline silicon films using microwave plasma enhanced chemical vapor deposition Thin Solid Films, 2018 DOI:10.1016/j.tsf.2017.10.031

[6]	The Variation of Crystalline Structure Induced by Gas Dilution and Thermal Annealing in Silicon Layers Deposited by PECVD Technique Silicon, 2018 DOI:10.1007/s12633-018-0025-8

[7]	Nanostructure evolution of magnetron sputtered hydrogenated silicon thin films Journal of Applied Physics, 2017 DOI:10.1063/1.4998455

[8]	Nanostructure evolution of magnetron sputtered hydrogenated silicon thin films Journal of Applied Physics, 2017 DOI:10.1063/1.4998455

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