Probe and Emission Spectrometry Diagnostics in Hollow Cathode Magnetron

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Journal of Modern Physics

ISSN Print: 2153-1196
ISSN Online: 2153-120X
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E-mail: jmp@scirp.org

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"Probe and Emission Spectrometry Diagnostics in Hollow Cathode Magnetron"
written by N. P. Poluektov, Yu P. Tsar’gorodsev, I. I. Usatov, A. G. Evstigneev, I. A. Kamyschov,
published by Journal of Modern Physics, Vol.3 No.10, 2012

has been cited by the following article(s):

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CrossRef

[1]	Study of Plasma Parameters and Deposition Rate of Titanium Thin Film in a DC Magnetron Sputtering Method
	Plasma Physics …, 2022

[2]	Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron
	2021

[3]	ИССЛЕДОВАНИЕ МАГНЕТРОНА С ПОЛЫМ КАТОДОМ, РАБОТАЮЩЕГО В РЕЖИМЕ МОЩНЫХ ИМПУЛЬСОВ
	2017

[4]	Ionization fraction of the sputtered metal flux in a hollow cathode magnetron
	Plasma Physics Reports, 2014

[5]	STEPEN'IONIZATsII POTOKA RASPYLENNYKh ATOMOV METALLA V MAGNETRONE S POLYM KATODOM
	Fizika plazmy, 2014

[6]	СТЕПЕНЬ ИОНИЗАЦИИ ПОТОКА РАСПЫЛЕННЫХ АТОМОВ МЕТАЛЛА В МАГНЕТРОНЕ С ПОЛЫМ КАТОДОМ
	ФИЗИКА ПЛАЗМЫ, 2014

[7]	Метод измерения степени ионизации потока атомов металла
	Вестник Московского государственного университета леса–Лесной вестник, 2014

[8]	Устройство регистрации и обработки первичной и вторичной информации для восстановления комплекса параметров разряда установок …
	2013

[1]	Study of Plasma Parameters and Deposition Rate of Titanium Thin Film in a DC Magnetron Sputtering Method Plasma Physics Reports, 2022 DOI:10.1134/S1063780X21100524

[2]	Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron Plasma Sources Science and Technology, 2021 DOI:10.1088/1361-6595/ac0b2a

[3]	Ionization fraction of the sputtered metal flux in a hollow cathode magnetron Plasma Physics Reports, 2014 DOI:10.1134/S1063780X14090086

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