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CONTROL-ORIENTED MODELING OF 2D TORSIONAL ...
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This paper presents a simplified model of 2D torsional micromirror for control design. The micromirror system is modeled as a two inputs two outputs (TITO) ...
CONTROL-ORIENTED MODELING OF 2D TORSIONAL ...
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2024年10月22日 — This paper presents a simplified model of 2D torsional micromirror for control design. The micromirror system is modeled as a two inputs two ...
Control-oriented modeling of 2D torsional micromirror
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Title: Control-oriented modeling of 2D torsional micromirror. Authors: Zhao, Y. Tay, F.E.H. · Chau, F.S. · Zhou, G. Keywords: MEMS Micromirror Modelling.
Journal articles: 'Control-oriented modeling'
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This paper presents a simplified model of 2D torsional micromirror for control design. The micromirror system is modeled as a two inputs two outputs (TITO) ...
Control-Oriented Modeling of 2d Torsional Micromirror.
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Bibliographic details on Control-Oriented Modeling of 2d Torsional Micromirror.
Description: Modeling of the optical torsion micromirror
Universiti Utara Malaysia
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A study of the static characteristics of a torsional micromirror by: Zhang, X.M., et al. Published: (2014); Control-oriented modeling of 2D torsional ...
MEMS Micromirror Actuation Techniques
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由 M Ahmad 著作2024 — [61] developed a process to devise a 2D torsion micromirror using bulk micromachining. ... Improving the nonlinear proportional-derivative control for an MEMS ...
2D Scanning Micromirror with Large Scan Angle and ...
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由 K Meinel 著作2020被引用 23 次 — A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented.
Guangya Zhou
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2024年10月7日 — 2000 – 2009 ; Yi Zhao, ; Francis Eng Hock Tay, ; Siong Chau Fook, Guangya Zhou: Control-Oriented Modeling of 2d Torsional Micromirror. Int. J.
Design of a 2D MEMS micromirror with indirect static ...
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In this paper the design, fabrication and electromechanical characteristics of a electrostatic torsional micromirror is presented. In addition to that the ...