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Development of Micro-Heaters with Optimized ...
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由 WJ Hwang 著作2011被引用 192 次 — In this study, a novel design of a poly-Si micro-heater is proposed to improve the uniformity of heat dissipation on the heating plate.
Development of micro-heaters with optimized temperature ...
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由 WJ Hwang 著作2011被引用 192 次 — In this study, a novel design of a poly-Si micro-heater is proposed to improve the uniformity of heat dissipation on the heating plate.
(PDF) Development of Micro-Heaters with Optimized ...
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2024年10月22日 — Therefore, this power compensated micro-heater design is suitable for a semiconductor gas sensor. Meanwhile, the poly-Si micro-heater without ...
[PDF] Development of Micro-Heaters with Optimized ...
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A novel design of a poly-Si micro-heater is proposed to improve the uniformity of heat dissipation on the heating plate and shows a short response time of ...
Design and Analysis of Micro-Heaters for Temperature ...
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由 VS Selvakumar 著作被引用 2 次 — In this paper, we report on the design and simulation of micro-heaters used in gas sensors with the aim of improving their temperature uniformity [3]. The ...
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The fabrication process of the MEMS micro-heater.
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The fabrication process of the MEMS micro-heater. Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors.
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Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors. ... Optimized Temperature Compensation Design for Gas Sensors ...
Micro-Heater-Based Gas Sensors
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2018年4月20日 — This chapter presents the design, fabrication, and characterization of micro-heaters with low power consumption, well-controlled temperature distribution, high ...
World Journal of Engineering Research
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Development of Micro- Heaters with optimized Temperature Compensation Design for. Gas Sensors, Sensors, 2011. 6. S. J. Patil, D. S. Bodas, A. S. Nassiopoulou ...
Micro-machined gas sensor array based on metal film ...
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Micro-machined gas sensor array based on metal film micro-heater ... Development of micro-heaters with optimized temperature compensation design for gas sensors.