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An Advanced Proximity Correction Technique for the IBM ...
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由 WJ Guillaume 著作1984 — MINUPROX - (Minimum Neighborhood Proximity Correction) is a novel approach to proximity correction used with the IBM EL-2 E-Beam direct exposure tool.
MINUPROX - an advanced proximity correction technique for the ...
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MINUPROX - (Minimum Neighborhood Proximity Correction) is a novel approach to proximity correction used with the IBM EL-2 E-Beam direct exposure tool.
MINUPROX - an advanced proximity correction technique for the ...
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MINUPROX - (Minimum Neighborhood Proximity Cor- rection) is a novel approach to proximity cor- rection used with the IBM EL-2 E-Beam direct ex- posure tool.
A. Kurylo
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W. J. Guillaume, A. Kurylo: MINUPROX - an advanced proximity correction technique for the IBM EL-2 electron beam tool. DAC 1984: 452-453.
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MINUPROX - An Advanced Proximity Correction Technique for the IBM El-2 Electron Beam Tool. W.J. Guillaume ,. A. Kurylo. Conference21st ...
Person: WJ Guillaume
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MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool ( WJG , AK ), pp. 452–453. Bibliography ...
EXPLORING AN IMAGE ANALYSIS APPROACH FOR THE ...
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MINUPROX - An Advanced Proximity Correction Technique for the IBM El-2 Electron Beam Tool. July 1984. W.J. Guillaume · A. Kurylo. MINUPROX - (Minimum ...
Corrections to proximity effects in electron beam ...
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由 M Parikh 著作2008被引用 59 次 — Mathematical formulations for the correction of proximity effects in electron beam lithography have been developed in the preceding paper. The ...
缺少字詞： MINUPROX - advanced EL- tool.
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MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool ( WJG , AK ), pp. 452–453. SIGIR-1973-Mitchell: A Note About ...
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MINUPROX - (Minimum Neighborhood Proximity Correction) is a novel approach to proximity correction used with the IBM EL-2 E-Beam direct exposure tool.