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Reynolds, M.B.
General Electric Co., San Jose, Calif. (USA). Atomic Power Equipment Dept1970
General Electric Co., San Jose, Calif. (USA). Atomic Power Equipment Dept1970
AbstractAbstract
No abstract available
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Source
Oct 1970; 36 p
Record Type
Report
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AbstractAbstract
No abstract available
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Source
Symposium on the technology of pressure-retaining steel components; Vail Village, Colo; 21 Sep 1970
Record Type
Journal Article
Literature Type
Progress Report
Journal
Nucl. Met., Met. Soc. AIME; v. 16 p. 218-231
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INIS IssueINIS Issue
AbstractAbstract
No abstract available
Primary Subject
Source
Sharpe, R.S. (ed.); UKAEA Research Group, Harwell. Atomic Energy Research Establishment; p.1-30; 1970; Academic Press; London
Record Type
Book
Literature Type
Progress Report
Country of publication
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INIS VolumeINIS Volume
INIS IssueINIS Issue
AbstractAbstract
No abstract available
Original Title
Otsenka ehffektivnosti primeneniya nejtronnogo defektoskopa dlya kontrolya izdelij iz svintsa
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Record Type
Journal Article
Journal
Zavodskaya Laboratoriya; v. 37(4); p. 450-452
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INIS VolumeINIS Volume
INIS IssueINIS Issue
AbstractAbstract
No abstract available
Original Title
Versuchsatomkraftwerk Kahl; Risse an Verlaengerungsrohren von Steuerstabantriebsstangen
Primary Subject
Source
Institut fuer Reaktorsicherheit der Technischen Ueberwachungsvereine e.V. Kurzinformation; No. 39/B; 1970; 3 p; 3 figs. - First publ. in 'Mitteilung Bayrisches Staatsministerium fuer Wirtschaft und Verkehr, 30.1.1970'.
Record Type
Miscellaneous
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Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue
AbstractAbstract
No abstract available
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Record Type
Journal Article
Literature Type
Progress Report
Journal
Sumitomo Kinzoku; v. 22(4); p. 476-484
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INIS VolumeINIS Volume
INIS IssueINIS Issue
AbstractAbstract
No abstract available
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Source
Symposium on the technology of pressure-retaining steel components; Vail Village, Colo; 21 Sep 1970
Record Type
Journal Article
Literature Type
Progress Report
Journal
Nucl. Met., Met. Soc. AIME; v. 16 p. 250-268
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INIS VolumeINIS Volume
INIS IssueINIS Issue
AbstractAbstract
No abstract available
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Record Type
Journal Article
Journal
Brit. J. Non-Destruct. Test; v. 13(5); p. 153-155
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INIS VolumeINIS Volume
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AbstractAbstract
No abstract available
Primary Subject
Source
Symposium on the technology of pressure-retaining steel components; Vail Village, Colo; 21 Sep 1970
Record Type
Journal Article
Literature Type
Progress Report
Journal
Nucl. Met., Met. Soc. AIME; v. 16 p. 232-249
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Reference NumberReference Number
INIS VolumeINIS Volume
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AbstractAbstract
[en] We have developed two new methods for at-wavelength inspection of mask blanks for extreme-ultraviolet (EUV) lithography. In one method an EUV photoresist is applied directly to a mask blank which is then flood exposed with EUV light and partially developed. In the second method, the photoresist is applied to an EUV transparent membrane that is placed in close proximity to the mask and then exposed and developed. Both reflectivity defects and phase defects alter the exposure of the resist, resulting in mounds of resist at defect sites that can then be located by visual inspection. In the direct application method, a higher contrast resist was shown to increase the height of the mounds, thereby improving the sensitivity of the technique. In the membrane method, a holographic technique was used to reconstruct an image of the mask, revealing the presence of very small defects, approximately 0.2 μm in size. The demonstrated clean transfer of phase and amplitude defects to resist features on a membrane will be important when flagging defects in an automatic inspection tool. (c) 1999 American Vacuum Society
Primary Subject
Record Type
Journal Article
Literature Type
Numerical Data
Journal
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; ISSN 0734-211X; 
; CODEN JVTBD9; v. 17(6); p. 3003-3008
; CODEN JVTBD9; v. 17(6); p. 3003-3008
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