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[en] The dependence of the sputtering yield and efficiency on the angle of incidence has been calculated using exact methods for treating half-space problems. The yield is found to increase with angle of incidence and to pass through a maximum value around 800 to 850. The efficiency increases monotonically with angle of incidence and does not exhibit a maximum except at 900. The results which are for self-sputtering and employ hard-sphere scattering agree qualitatively with experimental results. (author)
Journal
Radiation Effects Letters; ISSN 0142-2448; 
; v. 57(1-2); p. 5-13
; v. 57(1-2); p. 5-13