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AbstractAbstract
[en] Annealing, in the dark and under an ionization background of a 100 keV electron beam of intensity 7.5μA/cm2 and the UV light of a 250 W mercury lamp, was studied in silicon samples implanted at room temperature with doses 3.1013 - 2.1015 of boron ions/cm2, in the temperature range 400-9000C. Compared to thermal annealing in the dark, no change of the annealing course in the range 400-5500C is observed. At higher temperature ranges 550-6500C and 650-9000C the radiation annealing curve is shifted towards higher temperatures by an amount which depends on the dose of implanted boron ions. The activation energies obtained from isothermal annealing runs have higher values for the ionization background. A tentative interpretation attributes the retardment of the annealing processes to the charge-state modification of defects undergoing transformations induced by ionizing radiation. (author)
Record Type
Journal Article
Literature Type
Numerical Data
Journal
Electron Technology; v. 12(2); p. 67-77
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