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AbstractAbstract
[en] The invention aims at enlarging the control range of an ion beam current. The ion beam device contains a gas discharge ionization source consisting of a hollow cathode, an anode, a collector for introducing the operational gas, a shielded electromagnet accelerating or decelerating the electrons, a power supply system, and a system for controlling the ion current
Original Title
Ionenstrahleinrichtung
Primary Subject
Source
11 Jul 1984; 11 Jun 1981; vp; DD PATENT DOCUMENT 160984/B/; Available from BUCHEXPORT, DDR-7010 Leipzig; ?: 11 Jun 1981
Record Type
Patent
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