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[en] The movement in semiconductor fabrication towards 'islands of automation', combined with the high cost of maintaining installed capital equipment, demands the optimization of implanter utilization. Presently, skilled process engineers are required to regularly setup and adjust implanter parameters. Any reduction in the number of production hours devoted to ion beam implanter setup or recalibration after a species change would represent substantial improvements in both manpower and equipment utilization. (orig.)
Journal
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms; ISSN 0168-583X; 
; v. 6(1/2); p. 160-169
; v. 6(1/2); p. 160-169