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AbstractAbstract
[en] During ion implantation the phase stability and implanted ion composition are strongly affected by the radiation damage inherent in the process. A study was made of the role of radiation damage processes in the implantation of silicon into nickel at temperatures from 25 to 6500C. Radiation-induced segregation occurred, resulting in a greatly enriched silicon content on substrate surfaces. The crystalline nickel silicide phases, Ni5Si2, Ni2Si and NiSi2, were observed over a wide temperature range, including T<2000C. The Ni3Si phase, however, was destabilized by radiation damage and formed only at T>5000C. At T>2500C and fluences near or exceeding 1x1018 Si+ cm-2, the implanted layer recrystallized. Penetration of implanted silicon several thousand angstroems beyond the ballistic range of the implanted ions was also observed at these fluences for T>3500C. A microcrystalline phase formed in this fluence range at T<2000C. (orig.)
Primary Subject
Secondary Subject
Source
5. international conference on surface modification of metals by ion beams (SM2IB-5); Kingston (Canada); 7-11 Jul 1986; GRANT DMR-85-07641; DMR-82-07266
Record Type
Journal Article
Literature Type
Conference; Numerical Data
Journal
Country of publication
AUGER ELECTRON SPECTROSCOPY, CHEMICAL COMPOSITION, DISLOCATIONS, ELECTRON DIFFRACTION, EXPERIMENTAL DATA, GRAIN BOUNDARIES, HIGH TEMPERATURE, ION IMPLANTATION, MEDIUM TEMPERATURE, NICKEL, NICKEL SILICIDES, PHASE DIAGRAMS, PHYSICAL RADIATION EFFECTS, RADIATION DOSES, RECRYSTALLIZATION, SEGREGATION, SILICON ADDITIONS, SPATIAL DISTRIBUTION, STOICHIOMETRY, TRANSMISSION ELECTRON MICROSCO, X-RAY SPECTROSCOPY
COHERENT SCATTERING, CRYSTAL DEFECTS, CRYSTAL STRUCTURE, DATA, DIAGRAMS, DIFFRACTION, DISTRIBUTION, ELECTRON MICROSCOPY, ELECTRON SPECTROSCOPY, ELEMENTS, INFORMATION, LINE DEFECTS, METALS, MICROSCOPY, MICROSTRUCTURE, NICKEL COMPOUNDS, NUMERICAL DATA, RADIATION EFFECTS, SCATTERING, SILICIDES, SILICON COMPOUNDS, SPECTROSCOPY, TRANSITION ELEMENT COMPOUNDS, TRANSITION ELEMENTS
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