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AbstractAbstract
[en] The available experimental range and range profiles are compared with theoretical predictions based on different models for the electronic stopping cross-section. Implantation energies from 0.1 to 10 MeV are considered. In the entire energy range, the best agreement between the experimental data and the calculations is achieved for a combination of the Lindhard-Scharff and the Bethe-Block electronic stopping formulae using the empirical parameter Ck = 1.2. (author)
Source
Vacuum, electron and ion technologies: 5. Bulgarian summer school; Varna (Bulgaria); 6-10 Oct 1987
Record Type
Journal Article
Literature Type
Conference; Numerical Data
Journal
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Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue