[en] We have grown crystalline thin films of LaAlO₃ using off-axis rf sputtering from a single stoichiometric target. The films grow epitaxially on SrTiO₃ and LaAlO₃ (100) substrates as well as on YBa₂Cu₃O₇ thin films. We report on the growth conditions used to make these films, the properties of the films, and the properties of bilayer and trilayer structures containing both LaAlO₃ and YBa₂Cu₃O₇ films. Transmission electron microscopy cross-sectional and x-ray diffraction analyses indicate that all the constituent films in the multilayers grow epitaxially and that the interfaces between the films are sharply defined. Preliminary transport measurements on these multilayers show that LaAlO₃ can be used for dielectric layers in a variety of high-temperature superconductor electronic circuits