Regularities of structure defect distribution in semiconductors out of ion retardation zone at ion implantation

Kvasov, N.T.; Yarshyunas, K.Yu.; Spizhuk, S.F.; Shilina, S.Yu.

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Regularities of structure defect distribution in semiconductors out of ion retardation zone at ion implantation

Kvasov, N.T.; Yarshyunas, K.Yu.; Spizhuk, S.F.; Shilina, S.Yu.1990

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AbstractAbstract

[en] It was established experimentally qualitative correspondance of defect concentration profile out of ion retardation zone and pressure profile of elastic waves exited by interaction accelerated ions with crystal. The amount of generated defects is in proportion to inherent crystal defects

Original Title

O zakonomernosti raspredeleniya strukturnykh narushenij v poluprovodnikakh za predelami zony tormozheniya ionov pri ionnoj implantatsii

Primary Subject

MATERIALS SCIENCE (B2260)

Record Type

Journal Article

Journal

Fizika i Khimiya Obrabotki Materialov; ISSN 0015-3214;

; CODEN FKOMA; (no.5); p. 9-13

Country of publication

USSR

Descriptors (DEI)

ANGULAR DISTRIBUTION, ANTIMONIDES, BORON IONS, CRYSTAL DEFECTS, DIFFRACTION, INDIUM ALLOYS, INFRARED RADIATION, ION IMPLANTATION, KEV RANGE 10-100, LASER RADIATION, MONOCRYSTALS, PHYSICAL RADIATION EFFECTS, SILICON

Descriptors (DEC)

ALLOYS, ANTIMONY COMPOUNDS, ATOMIC IONS, CHARGED PARTICLES, COHERENT SCATTERING, CRYSTAL STRUCTURE, CRYSTALS, DISTRIBUTION, ELECTROMAGNETIC RADIATION, ELEMENTS, ENERGY RANGE, IONS, KEV RANGE, PNICTIDES, RADIATION EFFECTS, RADIATIONS, SCATTERING, SEMIMETALS

LanguageLanguage

Russian

Reference NumberReference Number

22059467

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