Laser applications in CVD

Stuke, M.

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Primary Subject
MATERIALS SCIENCE (1)

Subject Area
Nuclear Materials (1)

Record Type
Journal Article (1)

Literature Type
Conference (1)

Conference Title
9. international conference on chemical vapour deposition (Euro CVD-9) (1)

Journal Title
Journal de Physique 4. Colloque (1)

Publication Year
1993 (1)

Publication Year Range

1991 – 1995 (1)

Country of publication
France (1)

Language
English (1)

Descriptors
CHEMICAL REACTIONS (1)
CONTROL (1)
DECOMPOSITION (1)
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INIS Volume
25 (1)

INIS Issue
7 (1)

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Laser applications in CVD

Stuke, M.1993

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AbstractAbstract

[en] Short communication

Primary Subject

MATERIALS SCIENCE (B2210)

Source

9. international conference on chemical vapour deposition (Euro CVD-9); Tampere (Finland); 22-27 Aug 1993

Record Type

Journal Article

Literature Type

Conference

Journal

Journal de Physique 4. Colloque; ISSN 1155-4339;

; CODEN JPICEI; v. 3(3); p. 501

Country of publication

France

Descriptors (DEI)

LASER-RADIATION HEATING, METALS, PHOTOCHEMICAL REACTIONS, PHOTOLYSIS, PRECURSOR, PROCESS CONTROL, THIN FILMS

Descriptors (DEC)

CHEMICAL REACTIONS, CONTROL, DECOMPOSITION, ELEMENTS, FILMS, HEATING, PLASMA HEATING

LanguageLanguage

English

Reference NumberReference Number

25021077

INIS VolumeINIS Volume

INIS IssueINIS Issue

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