Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.018 seconds
AbstractAbstract
[en] Electron cyclotron resonance (ECR) plasma generation by microwave injection in suitable magnetic field structures is widespread now due to some major advantages: low power consumption (if permanent magnets are used), no electrodes in plasma chamber, low gas loading of the vacuum system. Choosing a particular magnetic field arrangement in a hydrogen ECR discharge, a significant negative-ion output can be observed. An experimental set-up for mass spectrometric investigation of an ECR hydrogen plasma is presented. The influence of discharge parameters (pressure, microwave power, magnetic field configuration, plasma chamber wall material) on the negative ion current was investigated. (Author)
Primary Subject
Secondary Subject
Source
Grecu, D. (Institute of Atomic Physics, Bucharest, P.O. Box MG-6 (Romania)); Romanian Physical Society, Bucharest (Romania); 160 p; 1993; p. 114; Institute of Atomic Physics. Information and Documentation Office; Bucharest (Romania); National Physics Conference; Constanta (Romania); 13-15 Oct 1993; Available from Romanian Physical Society Bucharest-Magurele, R-76900, P.O.Box MG-6, (RO)
Record Type
Miscellaneous
Literature Type
Conference
Country of publication
Reference NumberReference Number
Related RecordRelated Record
INIS VolumeINIS Volume
INIS IssueINIS Issue