Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.018 seconds
AbstractAbstract
[en] We have grown modulation-doped In0.53Ga0.47As/In0.52Al0.48As heterostructures on GaAs substrates using compositionally step-graded InxGa1-xAs buffers. Triple-axis x-ray diffraction measurements indicate nearly complete and isotropic strain relaxation in the buffer, lattice matching of the active layers with the top of the buffer, and no significant epilayer tilt. The temperature dependence and the photoresponse of the electron mobility suggest that transport in the heterostructures is limited principally by remote ionized-impurity scattering, with mobility values comparable to those of heterostructures grown lattice-matched to InP. copyright 1996 American Vacuum Society
Original Title
(In,Ga)As; (In,Al)As
Primary Subject
Source
23. conference on the physics and chemistry semiconductor interfaces; La Jolla, CA (United States); 21-25 Jan 1996; CONF-960117--
Record Type
Journal Article
Literature Type
Conference
Journal
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; ISSN 0734-211X; ; CODEN JVTBD9; v. 14(4); p. 3035-3039
Country of publication
ALUMINIUM ARSENIDES, CARRIER MOBILITY, DOPED MATERIALS, ELECTRIC CONDUCTIVITY, GALLIUM ARSENIDES, HALL EFFECT, HETEROJUNCTIONS, INDIUM ARSENIDES, MOLECULAR BEAM EPITAXY, PHOTOCURRENTS, STRAINS, TEMPERATURE DEPENDENCE, TEMPERATURE RANGE 0000-0013 K, TEMPERATURE RANGE 0013-0065 K, TEMPERATURE RANGE 0065-0273 K, TEMPERATURE RANGE 0273-0400 K
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue