[en] Performance of a micro WDX-PIXE system that consists of position sensitive x-ray spectrometer and the heavy ion microbeam line is described. The influence of the position resolution of the position sensitive proportional counter (PSPC) used in the spectrometer on system energy resolution is discussed based on the measured values for C and O K x-rays. The system has successfully been used for chemical state analysis of various compound materials and small area of the materials (<3 x 10^-3 mm²) can be analyzed. (author)