[en] The Research and Development of dE/dx and E- detectors with completely depleted area of volume charge, processes of dynamic etching in technology of silicon detectors with high-degree of flatness of the boundaries of sensitive area were studied. The following detectors were elaborated: precision current silicon detectors of ultra soft X-radiation; silicon telescope-spectrometers of charged particles including dE/dx and E-modules; detectors of thermal neutrons with efficiency of registration more than 31% thus permitting to use them in time of flight spectrometry d/L < 0.1%; spectrometers for α- and β radiation designated for measurements of radionuclides in environment samples. (author)