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Teo, E.J.; Osipowicz, T.; Bettiol, A.A.; Watt, F.; Hao, M.S.; Chua, S.J., E-mail: scip8064@nus.edu.sg2001
AbstractAbstract
[en] High resolution (<1 μm) channeling contrast microscopy (CCM) is employed to map variations of crystallographic orientation across micron-sized regions of lateral epitaxial overgrown (LEO) GaN thin film structures. The sample consists of 6 μm thick GaN stripes, aligned along the [1 1-bar 0 0]GaN direction, grown by LEO from 3 μm wide Si3N4 windows spaced 13 μm apart. Axial CCM using 2 MeV He+ is employed to investigate the crystalline structure of the LEO GaN layer. A low χmin of ∼2.8% and a critical angle ψ1/2 of ∼0.85 deg. is found, comparable with data obtained from broad beam channeling [J. Portmann, C. Huag, R. Benn, T. Frey, B. Schottker, D.J. As, Nucl. Instr. and Meth. B 155 (1999) 489]. 5 μm wide bands of high and low yield at a periodicity of 13 μm are observed in the CCM maps. This contrast is due to the opposing tilts of the [0 0 0 1] axis in the overgrown regions (the so-called wings) on either side of the window regions. From angular scan curves this tilt is found to be ±0.45 deg. in the direction perpendicular to the GaN stripes and no measurable wing tilt is found along the stripe direction
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Source
S0168583X01004608; Copyright (c) 2001 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
Journal
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms; ISSN 0168-583X; ; CODEN NIMBEU; v. 181(1-4); p. 231-237
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