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Abo, S.; Mizutani, M.; Nakayama, K.; Takaoka, T.; Iwamatsu, T.; Yamaguchi, Y.; Maegawa, S.; Nishimura, T.; Kinomura, A.; Horino, Y.; Takai, M., E-mail: takai@rcem.osaka-u.ac.jp2001
AbstractAbstract
[en] Suppression of the floating body effects in partially depleted SOI-MOSFETs (silicon-on-insulator metal oxide semiconductor field effect transistors) with and without body contact electrodes has been investigated using nuclear microprobes with currents of 5-250 pA. Transient SOI-MOSFET behavior with and without body contact electrodes during ion irradiation by three-dimensional computer simulation has also been compared with that using nuclear microprobes. The floating body effects were observed in SOI-MOSFETs without body contact electrodes by nuclear microprobe irradiation, while those were suppressed in the SOI-MOSFETs with body contacts
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S0168583X0100489X; Copyright (c) 2001 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Journal
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms; ISSN 0168-583X; ; CODEN NIMBEU; v. 181(1-4); p. 320-323
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