[en] This research develops a simple template assisted sol-gel process for preparing porous TiO₂ for a high performance humidity sensor. Tetraethyl orthosilicate (TEOS) as a template was directly introduced into TiO₂ sol formed by the hydrolysis and condensation of titanium alkoxide; the following calcination led to the formation of TiO₂-SiO₂ composite, and the selective removal of SiO₂ by dilute HF solution led to the formation of porous structure in TiO₂. The resulting porous TiO₂-based sensor exhibits high sensitivity and linear response in the wide relative humidity (RH) range of 11%-95%, with an impedance variation of four orders of magnitude to humidity change. Moreover, it exhibits a rapid and highly reversible response characterized by a very small hysteresis of < 1% RH and a short response-recovery time (5 s for adsorption and 8 s for desorption), and a 30-day stability test also confirms its long-term stability. Compared with pure TiO₂ prepared by the conventional sol-gel method, our product shows remarkably improved performance and good prospect for a high performance humidity sensor. The complex impedance spectra were used to elucidate its humidity sensing mechanism in detail.