[en] CoFe₂O₄ (CFO) epitaxial thin films of various thicknesses were grown on MgO substrates using the pulsed electron-beam deposition technique. The films have excellent in-plane coherence with the substrate, exhibit layer-by-layer growth and have well-defined thickness fringes in x-ray diffraction measurements. Atomic force microscopy (AFM) measurements indicate that misfit dislocations form in thicker films and the critical thickness for the dislocation formation is estimated. Perpendicular magnetic anisotropy in CFO due to epitaxial in-plane tensile strain from the substrate was found. A stripe-like domain structure in the demagnetized state is demonstrated using magnetic force microscopy (MFM), in agreement with previous predictions. Coercivity increased in thicker films, which is explained by domain wall pinning due to misfit dislocations at the CFO/MgO interface. - Highlights: → X-ray diffraction and rocking curves indicate films are amongst highest quality in the literature. → Domain structure of CoFe₂O₄ films on MgO was found to be stripe-like using MFM. → Critical thickness for misfit dislocations estimated and agrees with experiment. → Effect of misfit dislocations on surface morphology explained. → Role of dislocations and antiphase boundaries in domain wall formation and motion explained.