[en] Yttrium oxide (Y₂O₃) films have successfully been applied as anti-reflection (AR) and anti-oxidation films for diamond. For significant adhesion improvement between Y₂O₃ coating and diamond, aluminum nitride (AlN) as an interlayer is introduced. Y₂O₃ and AlN films were prepared by RF magnetron sputtering of Y₂O₃ ceramic target in Ar atmosphere and pure Al metal target in Ar + N₂ atmosphere, respectively. The Y₂O₃ and AlN films were studied by X-ray diffraction, X-ray photoelectron spectroscopy, Atomic force microscopy and Spectroscopic ellipsometry. Adherent Y₂O₃/AlN films on high optical quality chemical vapor deposition diamond with optimum thicknesses for infrared transmission enhancement in 8–10 μm were obtained by a Fourier transform infrared spectrometer. More than 28% increase in maximum transmission was observed for Y₂O₃/AlN//Diamond//AlN/Y₂O₃. Comparing between the designed and experimental AR effects for Y₂O₃/AlN film in 8–10 μm wavebands, experimental average AR effects are smaller for the absorption and scattering loss. AR effects for the Y₂O₃/AlN films on CVD diamond are proved to be excellent.