[en] In this article, a new type of superimposing morphology comprised of a periodic nanostructure and a random structure is proposed for the first time to enhance the light scattering in silicon-based thin film solar cells. According to the framework of the Reyleigh—Sommerfeld diffraction algorithm and the experimental results of random morphologies, we analyze the light-scattering properties of four superimposing morphologies and compare them with the individual morphologies in detail. The results indicate that the superimposing morphology can offer a better light trapping capacity, owing to the coexistence of the random scattering mechanism and the periodic scattering mechanism. Its scattering property will be dominated by the individual nanostructures whose geometrical features play the leading role. (electromagnetism, optics, acoustics, heat transfer, classical mechanics, and fluid dynamics)