Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.027 seconds
[en] Pump load calculations have been made which includes the volume of plasma vessel, the gas load and the channel conductivity. Gas loads consists of the release of gases (outgassing), permeation and leaks, while the channel conductivity includes the below, valves, Lbow and cross joint. The vacuum system design aims to obtain an efficient vacuum systems. The calculation result for rotary pump gas load = 7.33 x 10-2 torr liter/sec and turbo molecular pump = 4.8 × 10-5 torr liter/sec, viscous flow channel conductivity = 20.24 cm"3/sec and molecular flow = 295 cm"3/sec. The final vacuum is 1.25 × 10"-"6 Torr with an effective pumping speed of 24 m"3/h (DUO 20 rotary pump) and 665 liter/sec (turbo molecular HiPace® 700 M), and the pumping takes about 15 minutes. (author)
Source
Prayitno; Slamet Santosa; Darsono; Syarip; Agus Taftazani; Samin; Tri Mardji Atmono; Dwi Biyantoro; Herry Poernomo; Prajitno; Tjipto Sujitno; Gede Sutresna W; Djoko Slamet Pujorahardjo; Budi Setiawan; Bambang Siswanto; Endro Kismolo; Jumari (Center for Accelerator Science and Technology, National Nuclear Energy Agency, Yogyakarta (Indonesia)) (eds.); Suharyana; Sayekti Wahyuningsih (FMIPA-UNS, Surakarta (Indonesia)) (eds.); Wahini Nurhayati (BBKPP, Kemenperin, Yogyakarta (Indonesia)); Center for Accelerator Science and Technology, National Nuclear Energy Agency, Yogyakarta (Indonesia); 153 p; ISSN 1410-8178; 
; Aug 2016; p. 45-51; National Seminar on Research and Nuclear Devices Management; Seminar Nasional Penelitian dan Pengelolaan Perangkat Nuklir; Surakarta (Indonesia); 9 Aug 2016; Also available from Center for Utilization of Informatics and Region Strategic Nuclear, National Nuclear Energy Agency, Puspiptek Area, Fax. 62-21-7560895, Serpong, Tangerang Selatan 15314 (ID); 10 refs.; 9 tabs.; 5 figs.
; Aug 2016; p. 45-51; National Seminar on Research and Nuclear Devices Management; Seminar Nasional Penelitian dan Pengelolaan Perangkat Nuklir; Surakarta (Indonesia); 9 Aug 2016; Also available from Center for Utilization of Informatics and Region Strategic Nuclear, National Nuclear Energy Agency, Puspiptek Area, Fax. 62-21-7560895, Serpong, Tangerang Selatan 15314 (ID); 10 refs.; 9 tabs.; 5 figs.