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[en] In this study, the spatial distribution of plasma parameters in an experimental RF plasma device was performed. An automatic scanning system for the spectrometer and linear drive to detect plasma radiation was developed and implemented. The system is used to measure the spatial distribution of the electron temperature in a plasma discharge. (paper)
Journal
Journal of Physics. Conference Series (Online); ISSN 1742-6596; 
; v. 1094(1); [3 p.]
; v. 1094(1); [3 p.]