[en] In this paper, various magnetron deposition methods for applying a transparent conductive coating of zinc oxide doped with aluminum (AZO) on glass substrates such as the direct current mode, the radiofrequency mode, and the bipolar medium frequency mode are considered. In all experiments, the coatings were deposited by sputtering a sintered ZnO:Al (98:2) ceramic target in Ar gas atmosphere (99,998%). During the work, the transparency, resistivity and sheet resistance of the coatings were evaluated. The surface of the samples was also analyzed using a scanning electron microscope
[ru]
В данной работе рассмотрены различные способы нанесения прозрачного проводящего покрытия из оксида цинка, легированного алюминием (AZO) на стеклянные подложки магнетронным методом осаждения в режиме постоянного тока, в высокочастотном режиме и биполярном среднечастотном режиме. Во всех экспериментах покрытие наносится путем распыления спеченной керамической мишени ZnO:Al (с соотношением 98:2) в атмосфере инертного газа Ar (99,998%). В ходе работы были оценены показатели прозрачности, удельного и поверхностного сопротивления покрытий. Поверхность образцов также проанализирована при помощи сканирующего электронного микроскопаSource
Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 370 p; ISBN 978-5-7262-2655-2; 
; 2020; p. 131-132; 6. International conference ''Laser, plasma research and technologies - LaPlaz-2020''; VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»; Moscow (Russian Federation); 11-14 Feb 2020; 1 fig.
; 2020; p. 131-132; 6. International conference ''Laser, plasma research and technologies - LaPlaz-2020''; VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»; Moscow (Russian Federation); 11-14 Feb 2020; 1 fig.
No abstract available
Source
Kurnaev, V.A.; Savelov, A.S.; Kostyushin, V.A. (eds.); Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Moscow (Russian Federation); Nauchnyj Sovet po Fizike Nizkotemperaturnoj Plazmy RAN, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 196 p; ISBN 978-5-7262-2513-5; ; 2018; p. 126-127; 11. Conference 'Modern facilities of plasma diagnostics and their application'; XI Konferentsiya «Sovremennye sredstva diagnostiki plazmy i ikh primenenie»; Moscow (Russian Federation); 13-15 Nov 2018; 2 refs., 2 figs.
; 2018; p. 126-127; 11. Conference 'Modern facilities of plasma diagnostics and their application'; XI Konferentsiya «Sovremennye sredstva diagnostiki plazmy i ikh primenenie»; Moscow (Russian Federation); 13-15 Nov 2018; 2 refs., 2 figs.
[en] Transparent oxide coatings with thicknesses of the order of hundreds nanometers were obtained on the conducting FTO sublayer. The deposition of oxide films of nickel and tungsten was carried out in stationary (dcMS) and pulsed (HiPIMS) magnetron discharge regimes. The films stoichiometry and the value of grain size were determined by X-ray diffraction analysis
[ru]
Получены прозрачные оксидные покрытия с толщинами порядка сотен нанометров на проводящем подслое FTO. Осаждение оксидных пленок никеля и вольфрама проводилось в стационарных (dcMS) и импульсных (HiPIMS) режимах магнетронного разряда. Определены стехиометрия и размер зерен полученных пленок методом рентгеноструктурного анализаSource
Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 370 p; ISBN 978-5-7262-2655-2; ; 2020; p. 193-194; 6. International conference ''Laser, plasma research and technologies - LaPlaz-2020''; VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»; Moscow (Russian Federation); 11-14 Feb 2020; 4 refs., 1 fig.
; 2020; p. 193-194; 6. International conference ''Laser, plasma research and technologies - LaPlaz-2020''; VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»; Moscow (Russian Federation); 11-14 Feb 2020; 4 refs., 1 fig.
[en] The integral electrical characteristics of a pulsed magnetron discharge with a hot cathode with targets made of Cr, Cu, and Si have been measured. The phase trajectories of the discharge development in the voltage – current coordinates are constructed. Based on the results obtained, the modes of stable existence of a pulsed discharge with a hot target without transition to an arc shape are determined
[ru]
В работе описаны измеренные интегральные электрические характеристики импульсного магнетронного разряда с горячим катодом с мишенями из Cr, Cu и Si, построены фазовые траектории развития разряда. На основании полученных результатов определены режимы устойчивого существования импульсного разряда с горячей мишенью без перехода в дуговую формуSource
Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 388 p; ISBN 978-5-7262-2545-6; ; 2019; p. 103; LaPlaz-2019: 5. international conference on laser, plasma research and technologies; V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019; Moscow (Russian Federation); 12-15 Feb 2019
; 2019; p. 103; LaPlaz-2019: 5. international conference on laser, plasma research and technologies; V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019; Moscow (Russian Federation); 12-15 Feb 2019
No abstract available
Source
Rossijskaya Akademiya Nauk, Moscow (Russian Federation); Inst. Obshchej Fiziki im. A.M. Prokhorova RAN, Moscow (Russian Federation); Ob''edinennyj Inst. Vysokikh Temperatur RAN, Moscow (Russian Federation); Nauchnyj Sovet RAN po Fizike Plazmy, Moscow (Russian Federation); Nauchnyj Sovet RAN po Kompleksnoj Probleme Fizika Nizkotemperaturnoj Plazmy, Moscow (Russian Federation); Gosudarstvennyj Nauchnyj Tsentr RF TRINITI, Moscow, Troitsk (Russian Federation); Nauchno-Tekhnologicheskij Tsentr PLASMAIOFAN, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. MIFI, Moscow (Russian Federation); Moskovskij Gosudarstvennyj Univ. im. M.V. Lomonosova, Moscow (Russian Federation); 246 p; ISBN 978-5-6042115-4-0; ; 2021; p. 156; ICPAF-2021: 48. International Zvenigorod conference on plasma physics and controlled fusion; XLVIII Mezhdunarodnaya Zvenigorodskaya konferentsiya po fizike plazmy i upravlyaemomu termoyadernomu sintezu ICPAF-2021; Zvenigorod (Russian Federation); 15-19 Mar 2021; 3 refs., 1 fig.
; 2021; p. 156; ICPAF-2021: 48. International Zvenigorod conference on plasma physics and controlled fusion; XLVIII Mezhdunarodnaya Zvenigorodskaya konferentsiya po fizike plazmy i upravlyaemomu termoyadernomu sintezu ICPAF-2021; Zvenigorod (Russian Federation); 15-19 Mar 2021; 3 refs., 1 fig.
No abstract available
Source
Rossijskaya Akademiya Nauk, Moscow (Russian Federation); Inst. Obshchej Fiziki im. A.M. Prokhorova RAN, Moscow (Russian Federation); Ob''edinennyj Inst. Vysokikh Temperatur RAN, Moscow (Russian Federation); Nauchnyj Sovet RAN po Fizike Plazmy, Moscow (Russian Federation); Nauchnyj Sovet RAN po Kompleksnoj Probleme Fizika Nizkotemperaturnoj Plazmy, Moscow (Russian Federation); Gosudarstvennyj Nauchnyj Tsentr RF TRINITI, Moscow, Troitsk (Russian Federation); Nauchno-Tekhnologicheskij Tsentr PLASMAIOFAN, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. MIFI, Moscow (Russian Federation); Moskovskij Gosudarstvennyj Univ. im. M.V. Lomonosova, Moscow (Russian Federation); 246 p; ISBN 978-5-6042115-4-0; ; 2021; p. 155; ICPAF-2021: 48. International Zvenigorod conference on plasma physics and controlled fusion; XLVIII Mezhdunarodnaya Zvenigorodskaya konferentsiya po fizike plazmy i upravlyaemomu termoyadernomu sintezu ICPAF-2021; Zvenigorod (Russian Federation); 15-19 Mar 2021; 3 refs., 1 fig.
; 2021; p. 155; ICPAF-2021: 48. International Zvenigorod conference on plasma physics and controlled fusion; XLVIII Mezhdunarodnaya Zvenigorodskaya konferentsiya po fizike plazmy i upravlyaemomu termoyadernomu sintezu ICPAF-2021; Zvenigorod (Russian Federation); 15-19 Mar 2021; 3 refs., 1 fig.