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Kagoshima, Y.; Takai, K.; Ibuki, T.; Yokoyama, Y.; Hashida, T.; Yokoyama, K.; Takeda, S.; Urakawa, M.; Miyamoto, N.; Tsusaka, Y.; Matsui, J.; Aino, M., E-mail: kagosima@sci.himeji-tech.ac.jp2001
AbstractAbstract
[en] A scanning hard X-ray microscope using a phase zone plate made of tantalum as its X-ray focusing device is in operation at the Hyogo-BL (BL24XU) of SPring-8. The X-ray microbeam has a size of 0.8 μmx0.7 μm at the photon energy of 10 keV, which can make visible structures as fine as 250-nm line-and-space pattern. The photon flux density at the sample position is ∼2x109 phs/s/μm2 and the gain of the phase zone plate is ∼3000. The minimum detection limits irradiated by the microbeam are evaluated to be around 10 ppm for some trace elements contained in standard reference materials of glass matrices. X-ray images obtained so far demonstrate a high feasibility of the microscope
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Source
S0168900201005046; Copyright (c) 2001 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: Germany
Record Type
Journal Article
Journal
Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment; ISSN 0168-9002; ; CODEN NIMAER; v. 467-468(1); p. 872-876
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