[en] Monitoring physical quantities using acoustic wave devices can be advantageously achieved using the wave characteristic dependence to various parametric perturbations (temperature, stress, and pressure). Surface acoustic wave (SAW) resonators are particularly well suited to such applications as their resonance frequency is directly influenced by these perturbations, modifying both the phase velocity and resonance conditions. Moreover, the intrinsic radio frequency (rf) nature of these devices makes them ideal for wireless applications, mainly exploiting antennas reciprocity and piezoelectric reversibility. In this paper, we present a wireless SAW sensor interrogation unit operating in the 434 MHz centered ISM band--selected as a tradeoff between antenna dimensions and electromagnetic wave penetration in dielectric media--based on the principles of a frequency sweep network analyzer. We particularly focus on the compliance with the ISM standard which reveals complicated by the need for switching from emission to reception modes similarly to radar operation. In this matter, we propose a fully digital rf synthesis chain to develop various interrogation strategies to overcome the corresponding difficulties and comply with the above-mentioned standard. We finally assess the reader interrogation range, accuracy, and dynamics.

[en] There has been growing interest in recent years in the understanding of microsystems and the mechanical properties essential for their design. In this context, an experimental technique is proposed to characterize the structures of small dimensions composed of both silicon and lithium niobate and assembled using three different adhesive materials (SU8 (5 and 1 µm) and compressed gold) surrounded by various ambient air pressure levels. Dynamic tests were performed on three different structures used for the manufacturing of a harvesting energy microconverter. The assembled structure is mounted on a support and excited by a white noise signal via an electromagnetic shaker. The dynamic responses are recorded by a Doppler laser vibrometer and the modal parameters (obtained from the dynamic response) are identified in order to determine their evolution when the ambient air pressure inside the vacuum chamber is changed. A nonlinear modal identification is then performed. It is based on the logarithmic decrement method applied in the time–frequency domain using a wavelet transform of the time responses. The evolution of the equivalent modal frequencies and damping of the assembled structure versus time and vibration magnitude are identified for several pressure values ranging from a secondary vacuum to atmospheric pressure

[en] Using high-quality epitaxial c-axis Pb(Zr_0.2Ti_0.8)O₃ films grown by off-axis magnetron sputtering onto metallic (001) Nb-doped SrTiO₃ substrates, a nonconventional thin-film surface acoustic wave device based on periodic piezoelectric transducers was realized. The piezoelectric transducers consist of a series of ferroelectric domains with alternating polarization states. The artificial modification of the ferroelectric domain structure is performed by using an atomic force microscope tip as a source of electric field, allowing local switching of the polarization. Devices with 1.2 and 0.8 μm wavelength, defined by the modulation period of the polarization, and corresponding to central frequencies in the range 1.50-3.50 GHz have been realized and tested

[en] LIGA technique has proved to be a powerful tool for micro-fabrication mass production. French laboratories (LURE, L2M, LPMO) gathered to introduce this new technology at LURE facilities. In this paper are described the different steps of the deep etch lithography process including mask realization and first pseudo-tridimensional resist structures are shown. (orig.)