[en] A direct one-step and low temperature micro-fabrication process, enabling to realize large area totally inorganic TiO₂ micro-patterns from a spin-on resist, is presented. High refractive index structures (up to 2 at 632 nm) without the need for transfer processes have been obtained by mask assisted UV lithography, exploiting photocatalytic titania properties. A distinctive feature not shared by any of the known available resists and boosting the material versatility, is that the system behaves either as a positive or as negative tone resist, depending on the process parameters and on the development chemistry. In order to explain the resist double tone behavior, deep comprehension of the lithographic process parameters optimization and of the resist chemistry and structure evolution during the lithographic process, generally uncommon in literature, is reported. Another striking property of the presented resist is that the negative tone shows a high contrast up to 19, allowing to obtain structures resolution down to 2 μm wide. The presented process and material permit to directly fabricate different titania geometries of great importance for solar cells, photo-catalysis, and photonic crystals applications.

[en] Both SIMS and RBS techniques are used to obtain smooth accurate concentration profiles of silver diffused into soda-lime glass systems. By a computer simulation, a combination of the two techniques enables more detailed information to be obtained on the silver distribution at a depth of up to several micrometres, and the concentration profiles can be used effectively for testing the reliability of some optical behaviour characterizations of glass waveguiding structures. (Author)

[en] We present the realization and characterization of an active spherical diffraction grating with variable radius of curvature to be used in grazing-incidence monochromators. The device consists of a bimorph deformable mirror on the top of which a diffraction grating with laminar profile is realized by UV lithography. The experimental results show that the active grating can optimize the beam focalization of visible wavelengths through its rotation and focus accommodation.

[en] Nanostructured plasmonic sensors are fabricated as sinusoidal surface plasmon metallic gratings (SPGs) embedded in a functional and porous hybrid sol–gel material, phenyl-bridged polysilsesquioxane (ph-PSQ). The metal layer is in contact with the environment through the sol–gel film, which works as sensitive element, changing its dielectric properties upon interaction with aromatic hydrocarbons. The combination of sensitivity, transparency and patternability offered by ph-PSQs gives the exceptional possibility to fabricate innovative optical sensors with straightforward processes. An embedded SPG is a thin metal slab waveguide, in which the surface plasmon polaritons (SPPs) at the two metal–dielectric interfaces superpose, resulting in two physical coupled modes: the long range SPPs (LRSPPs) and the short range SPPs (SRSPPs). An extended experimental and theoretical characterization of the optical properties of the plasmonic device was performed. The sensor performance was tested against the detection of 30 ppm xylene, monitoring the influence of the target gas on the SPPs modes. A reversible red-shift of the reflectance dips of both LRSPP and SRSPP resonances in the 1.9–2.9 nm range was observed and correlated to the interaction with the analyte. An enhancement in sensitivity associated with the rotation of the grating grooves with respect to the scattering plane (azimuthal rotation) was verified within the experimental errors. Collected data are compatible with theoretical predictions assuming a variation of the film refractive index of 0.011 ± 0.005. (paper)

[en] We present and characterize an organic–inorganic hybrid sol–gel material, phenyl-bridged polysilsesquioxane (ph-PSQ), for use as a new high resolution resist for electron beam lithography (EBL). The resist has a unique characteristic as the only positive tone silica-based resist available for EBL. Exploring the processing parameters has revealed that it is possible to switch the behaviour from negative to positive tone by application of a post-exposure bake (PEB). Based on the results from micro-FTIR spectroscopy, a description of the tone switching mechanisms is proposed. The negative tone behaviour is explained by the etch rate difference between silanol groups and cross-linked silica, present in unexposed and in exposed areas of the films, respectively. In the case of positive tone, after a PEB, the etch rate difference between a thermally densified cross-linked silica network and cage-like silica structures allows us to reveal the pattern. Contrast and sensitivity are estimated under different processing conditions, and the significant parameters for line edge roughness minimization are pointed out. Dense patterns down to 25 nm half-pitch and isolated structures down to 30 nm are demonstrated, exploiting the positive tone, and dense patterns down to 60 nm half-pitch are demonstrated in the negative tone. Etching selectivities in fluorinated gases for ph-PSQ nanostructures on silicon substrates are 1–9 for the positive tone and 1–12 for the negative tone. (paper)

[en] We propose a direct nanopatterning process of hybrid sol-gel materials useful for photonics application. A specific organic-inorganic film based on 3-glycidoxypropyltrimethoxysilane with epoxy rings acting as silica network modifier and sensitive to radiation has been developed, with a controlled inorganic crosslinking degree and an almost total absence of organic polymerization. The film has been exposed to electron beam or X-ray synchrotron radiation. Both the interactions induce the polymerization of the organic part of the film generating its hardening after post exposure baking. The exposed material becomes insoluble determining a negative-resist like behaviour: the nanolithographic process results from the dissolution of the un-exposed areas in proper solvents. After its optimization unexpected spatial resolution of the pattern were achieved with structures below 200 nm sized, both with electron beam and X-ray lithography. The real advantages of this approach are that almost all the significant parameters for a photonic device (refractive index, light absorption and emission) can be tailored during the material synthesis and with a single lithographic step the device is ready without any further etching process, undoubtedly simplifying the photonic devices nanofabrication. A demonstration test has been performed doping the film with commercial Rhodamine 6G that after the exposure didn't degraded its luminescence efficiency

[en] A sol–gel route for TiO₂ nanocrystals (NCs) synthesis has been developed at low temperature without surfactants. Synthetic and processing parameters have been optimized to maximize particles’ colloidal stability and crystallinity. The obtained TiO₂ NCs can be homogeneously dispersed in a sol–gel derived organic–inorganic hybrid material, resulting in homogeneous composite films when prepared by spin coating. High refractive index films were obtained with high TiO₂ NCs loading and good transparency. Furthermore, TiO₂ colloidal solutions can be used for depositing porous crystalline films, whose structural evolution has been followed under different annealing treatments. Nanocrystals were characterized by UV–Vis absorption, TEM, FT-Raman, and XRD techniques, while nanocomposite and TiO₂ films were analyzed by SEM, TEM, and spectroscopic ellipsometry.

[en] Generation of artificial vascular grafts as blood vessel substitutes is a primary challenge in biomaterial and tissue-engineering research. Ideally, these grafts should be able to recapitulate physiological and mechanical properties of natural vessels and guide the assembly of an endothelial cell lining to ensure hemo-compatibility. In this paper, we advance on this challenging task by designing and fabricating 3D vessel analogues by two-photon laser lithography using a synthetic photoresist. These scaffolds guarantee human endothelial cell adhesion and proliferation, and proper elastic behavior to withstand the pressure exerted by blood flow. (paper)