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Castro C, M.A.; Escobar A, L.; Camps C, E.; Mejia H, J.A.
Instituto Nacional de Investigaciones Nucleares. Sindicato Unico de Trabajadores de la Industria Nuclear (Mexico)2004
Instituto Nacional de Investigaciones Nucleares. Sindicato Unico de Trabajadores de la Industria Nuclear (Mexico)2004
AbstractAbstract
[en] Thin films of titanium nitride were deposited using the technique of laser ablation. It was studied the effect of the density of laser energy used for ablation the target as well as of the pressure of the work gas about the structure and the hardness of the deposited thin films. Depending on the pressure of the work gas films was obtained with preferential orientation in the directions (200) and (111). At a pressure of 1 x 10-2 Torr only the direction (200) was observed. On the other hand to the pressure of 5 x 10-3 Torr the deposited material this formed by a mixture of the orientation (200) and (111), being the direction (111) the predominant one. Thin films of Ti N were obtained with hardness of up to 24.0 GPa that makes to these attractive materials for mechanical applications. The hardness showed an approximately linear dependence with the energy density. (Author)
Original Title
Caracterizacion estructural de peliculas delgadas de nitruro de titanio depositadas por ablacion laser
Source
2004; 7 p; 14. ININ-SUTIN Technical and Scientific Congress; Salazar, Estado de Mexico (Mexico); 24-26 Nov 2004
Record Type
Miscellaneous
Literature Type
Conference
Report Number
Country of publication
ALLOYS, CARBON ADDITIONS, COHERENT SCATTERING, DIFFRACTION, DIFFRACTOMETERS, DIMENSIONS, ELECTROMAGNETIC RADIATION, FILMS, INFORMATION, IRON ALLOYS, IRON BASE ALLOYS, LASERS, MEASURING INSTRUMENTS, MICROSTRUCTURE, NITRIDES, NITROGEN COMPOUNDS, PNICTIDES, PRESSURE RANGE, RADIATIONS, SCATTERING, SIZE, SOLID STATE LASERS, TITANIUM COMPOUNDS, TRANSITION ELEMENT ALLOYS, TRANSITION ELEMENT COMPOUNDS
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