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[en] X-ray Lithography is an important micro-lithographic technology for submicron application in the future. Recently the application of synchrotron radiation X-ray source is a great progress of X-ray Lithography. This paper describes the position and importance of Synchrotron Radiation X-ray Lithography in microelectronic technology, its status and main technical problems. The development of Synchrotron Radiation X-ray Lithography in China is also introduced
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