[en] A 3D mathematical model of a complete Deep X-Ray Lithography scanning unit based on the Finite Element Method (FEM) was developed to analyse the replication errors induced by the thermoelastic deformations occurring under irradiation. Different thermal and mechanical constraint conditions were considered in order to evaluate the maximum displacements of the irradiated mask area. The obtained results show that, to evaluate the replication errors, the support ring and its mechanical fittings have to be carefully considered in the model. It is observed that the absolute position error and the blur error and the error induced by the thermal expansion of the mask are both position dependent

[en] The FERMI-Elettra free electron laser (FEL) user facility is under construction at Sincrotrone Trieste (Italy), and it will be operative in late 2010. It is based on a seeded scheme providing an almost perfect transform-limited and fully spatially coherent photon beam. FERMI-Elettra will cover the wavelength range 100 to 3 nm with the fundamental harmonics, and down to 1 nm with higher harmonics. We present the layout of the photon beam transport system that includes: the first common part providing on-line and shot-to-shot beam diagnostics, called PADReS (Photon Analysis Delivery and Reduction System), and 3 independent beamlines feeding the experimental stations. Particular emphasis is given to the solutions adopted to preserve the wavefront, and to avoid damage on the different optical elements. Peculiar FEL devices, not common in the Synchrotron Radiation facilities, are described in more detail, e.g. the online photon energy spectrometer measuring shot-by-shot the spectrum of the emitted radiation, the beam splitting and delay line system dedicated to cross/auto correlation and pump-probe experiments, and the wavefront preserving active optics adapting the shape and size of the focused spot to meet the needs of the different experiments.

[en] The FERMI-Elettra free electron laser (FEL) user facility is currently under construction at the Sincrotrone Trieste laboratory in Trieste (Italy). It will cover the wavelength range from 100 to about 5 nm in the fundamental and 3 or 1 nm using the third harmonic. We report the layout of the photon beam diagnostics section, the radiation transport system to the experimental area, and the photon beam distribution system. Due to the peculiar characteristics of the emitted FEL radiation (high peak power, short pulse length, and statistical variation of the emitted intensity and distribution), the realization of the diagnostics system is particularly challenging. The end users are interested in parameters such as the radiation pulse intensity and spectral distribution, as well as in the possibility to attenuate the intensity. In order to accomplish these tasks, a photon analysis, delivery, and reduction system is now under development and construction and is presented here. This system will work on-line producing pulse-resolved information and will let users keep track of the photon beam parameters during the experiments.

[en] X-ray computed micro-tomography (μCT) is one of the most advanced and common non-destructive techniques in the field of medical imaging and material science. It allows recreating virtual models (3D models), without destroying the original objects, by measuring three-dimensional X-ray attenuation coefficient maps of samples on the (sub) micrometer scale. The quality of the images obtained using μCT is strongly dependent on the performance of the associated X-ray detector i.e. to the acquisition of information of the X-ray beam traversing the patient/sample being precise and accurate. Detectors for μCT have to meet the requirements of the specific tomography procedure in which they are going to be used. In general, the key parameters are high spatial resolution, high dynamic range, uniformity of response, high contrast sensitivity, fast acquisition readout and support of high frame rates. At present the detection devices in commercial μCT scanners are dominated by charge-coupled devices (CCD), photodiode arrays, CMOS acquisition circuits and more recently by hybrid pixel detectors. Monolithic CMOS imaging sensors, which offer reduced pixel sizes and low electronic noise, are certainly excellent candidates for μCT and may be used for the development of novel high-resolution imaging applications. The uses of monolithic CMOS based detectors such as the PERCIVAL detector are being recently explored for synchrotron and FEL applications. PERCIVAL was developed to operate in synchrotron and FEL facilities in the soft X-ray regime from 250 eV to 1 keV and it could offer all the aforementioned technical requirements needed in μCT experiments. In order to adapt the system for a typical tomography application, a scintillator is required, to convert incoming X-ray radiation ($\sim <!--\; ???\; -->$ tens of KeV) into visible light which may be detected with high efficiency. Such a taper-based scintillator was developed and mounted in front of the sensitive area of the PERCIVAL imager. In this presentation we will report the setup of the detector system and preliminary results of first μCTs of reference objects, which were performed in the TomoLab at ELETTRA.