[en] An investigation of the influence of deposition and post-fabrication processes on the final mechanical structure of tantalum beams is reported in the present study. The final deflection profiles of doubly supported beams made from compressive and tensile-stressed films have been studied experimentally. An optimum finite element model has been developed to predict the buckling behaviour of the doubly supported beams by considering the boundary conditions in the form of a compressive stress and an applied load. No matter which etch release method has been used, the initial stress state of the as-deposited films has been found to have a significant impact on the final deflection profile of the fabricated device. The compressive-stressed films have presented larger deflection in the final released beams than the tensile-stressed films. Taking into account the type of etch release methods, the beams that have been released in the dry etch release processes have been found to deform more vertically than those released in the wet-etch release method. Moreover, it has been found that the amplitude of vertical deflection increases with the increase of the beam length and thickness. The results indicate that optimum profiles of tantalum suspended structures can be obtained from the tensile-stressed films that have been released by the wet etching method with an aspect ratio of 1:48. (paper)

[en] SCUBA-2, which replaces the Submillimetre Common User Bolometer Array (SCUBA) (Mon. Not. R. Astron. Soc. 303 (1999) 659) on the James Clerk Maxwell telescope in 2006, will be the first CCD-like array for submillimeter astronomy. Unlike previous detectors which have used discrete bolometers, SCUBA-2 has two DC-coupled, monolithic, filled arrays with a total of ∼10,000 bolometers. It will offer simultaneous imaging of an 8x8 arcmin field of view at wavelengths of 850 and 450 μm. SCUBA-2 is expected to have a huge impact on the study of galaxy formation and evolution in the early Universe as well as star and planet formation in our own Galaxy. Mapping the sky to the same S/N up to 1000 times faster than SCUBA, it will also act as a pathfinder for the new submillimetre interferometers such as ALMA. SCUBA-2's absorber-coupled pixels use superconducting transition edge sensors (Ph.D. Thesis, Stanford, 1995) operating at ∼120 mK for photon noise limited performance. The monolithic silicon detector arrays are deep-etched by the Bosch process to isolate the pixels on silicon nitride membranes (Nucl. Instr. and Meth. A, these proceedings). Electrical connections are made through indium bump bonds to a backplane that incorporates a SQUID time-domain multiplexer. We describe the key technologies that make SCUBA-2 possible and give an update on the considerable progress in the detector development and instrument design that has taken place over the last 2 years

[en] Submillimeter common user bolometer array (SCUBA)-2 is a wide field sub-mm bolometer camera designed to replace the existing SCUBA instrument on the JCMT in Hawaii. It will be many hundreds of times faster in large area mapping than SCUBA and will also go deeper in a single frame. It will enable the many discoveries of SCUBA to be followed up with deep systematic surveys and help act as a pathfinder for the ALMA interferometer. The key technologies for making the arrays have been demonstrated and will be put together to fabricate the first prototype later this year (2003). The wide field nature of the SCUBA-2 bolometer camera, combined with the diffraction limit at sub-mm wavelengths, leads to physically large focal planes where the issues of stray light control, magnetic shielding, and electrical, thermal and mechanical connection must be carefully addressed in order to realise a successful instrument. We describe the solutions we have adopted for these problem areas

[en] This paper describes reflective adaptive/active optics for applications including studies of biological radiation damage. The optics work on the polycapillary principle, but use arrays of channels in thin silicon. For optimum performance the x-rays should reflect once off a channel wall in each of two successive arrays. This reduces aberrations since then the Abbe sine condition is approximately satisfied. Adaptivity is achieved by flexing the arrays via piezo actuation, providing further aberration reduction and controllable focal length.

[en] The UK Smart X-Ray Optics (SXO) programme is developing active/adaptive optics for terrestrial applications. One of the technologies proposed is micro structured optical arrays (MOAs), which focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels. Although such arrays are similar in concept to poly capillary and microchannel plate optics, they can be bent and adjusted using piezoelectric actuators providing control over the focusing and inherent aberrations. Custom configurations can be designed, using ray tracing and finite element analysis, for applications from sub-keV to several-keV X-rays, and the channels of appropriate aspect ratios can be made using deep silicon etching. An exemplar application will be in the micro probing of biological cells and tissue samples using Ti Ka radiation (4.5?keV) in studies related to radiation-induced cancers. This paper discusses the optical design, modelling, and manufacture of such optics

[en] We describe miniature all-optical pressure sensors, fabricated by wafer etching techniques, less than 1mm² in overall cross-section with rise times in the μs regime and pressure ranges typically 600 kPa. Their performance is suitable for experimental studies of the pressure-time history for test models exposed to shocks initiated by an explosive charge. The small size and fast response of the sensors promises higher quality data than has been previously available from conventional electrical sensors, with potential improvements to numerical models of blast effects. Provisional results from blast tests will be presented in which up to 6 sensors were multiplexed, embedded within test models in a range of orientations relative to the shock front