[en] Sputtered particle (SP) propagation during scattering by atoms of a light gas is considered. The law of deceleration, connecting the SP range with energy loss during motion, is obtained. Spatial distribution of Be sputtered atom density, thermalized in deuterium medium, is calculated for magnetron sputtering. The calculated data are compared with thermalization simulation by the Monte Carlo method

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[en] Results of experimental and theoretical analysis of plasma discharge in planar DC magnetron are considered in this report. The device was developed for modeling of plasma/wall interaction in International Thermonuclear Experimental Reactor (ITER). Experiments were performed using both hydrogen and argon as working medium in pressure range of 10^-3 - 2 x 10^-2 torr. Beryllium was used as material of sputtered cathode in order to simulate phenomena on ITER beryllium first wall protection. Voltage-current contributions of the discharge were obtained for different hydrogen pressures and magnetic field induction near the cathode surface. The discharge voltage in case of hydrogen medium was about one half of that obtained for argon for equal total current. Apparently it is caused by beryllium using as a cathode material. Processes of beryllium erosion and following redeposition of sputtered beryllium atoms on surfaces of the target and vacuum chamber walls were observed and investigated. Some aspects of applying of such magnetrons for producing of thin beryllium coatings and films are considered in the report also

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[en] To understand the processes that take part under the simultaneous erosion of different plasma facing materials in a fusion reactor, experiments simulating ITER conditions were carried out, in which beryllium and tungsten targets were simultaneously exposed to deuteron fluxes causing their intensive erosion and re-deposition. This paper reports the results of a study of the retention of deuterium atoms in those layers, the composition and microstructure of re-deposited/sputtered beryllium and tungsten layers

[en] The behavior of the plasma facing Be-elements in the International Thermonuclear Experimental Reactor ITER will be affected by the re-deposition of other eroded plasma facing materials. The effect of carbon- and tungsten-additions on the microstructure, chemical composition and hydrogen isotope accumulation in the sputtered and re-deposited layers of beryllium TGP-56 at its interaction with 200 - 300 eV hydrogen isotope ions was studied in the MAGRAS facility equipped with a magnetron sputtering system. (author)

[en] Quantitative characteristics of Be-sputtering by hydrogen isotope ions in a magnetron sputtering system, the microstructure and composition of the sputtered and re-deposited layers were studied. The energies of H⁺ and D⁺ ions varied from 200 to 300 eV. The ion flux density was ∼3 x 10²¹ m^-2 s^-1. The irradiation doses were up to 4 x 10²⁵ m^-2. For modeling of the sputtered Be-atom re-deposition at increased deuterium pressures (up to 0.07 torr), a mode of operation with their effective return to the Be-target surface was implemented. An atomic ratio O/Be congruent with 0.8 was measured in the re-deposited layers. A ratio D/Be decreases from 0.15 at 375 K to 0.05 at 575 K and slightly grows in the presence of carbon and tungsten. The oxygen concentration in the sputtered layers does not exceed 3 at.%. The atomic ratio D/Be decreases there from 0.07 to 0.03 at target temperatures increase from 350 to 420 K

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