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Source
Tulinov, A.F. (ed.); Moskovskij Gosudarstvennyj Universitet im. M.V. Lomonosova, Nauchno-Issledovatel'skij Institut Yadernoj Fiziki im. D.V. Skobel'tsyna, Moscow (Russian Federation); 200 p; ISBN 5-88800-297-6; 
; 2005; p. 110; XXXV International conference on physics of interaction of charged particles with crystals; XXXV Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami; Moscow (Russian Federation); 31 May - 2 Jun 2005; 6 refs.
; 2005; p. 110; XXXV International conference on physics of interaction of charged particles with crystals; XXXV Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami; Moscow (Russian Federation); 31 May - 2 Jun 2005; 6 refs.
[en] A quantitative method for determining the profiles of nitrogen, implanted to niobium, based on the reflected electron energy spectrum analysis, is proposed. Samples of niobium, implanted by nitrogen with 7x1017 dose and 35 keV energy are studied. The heat contains 33% of atomary ions and 67% of molecular ions. The effective probing depth makes up from 250 to 6700 A. NbNb concentration profile, calculated on the base of the reflected electron spectra obtained, is presented. 10 refs., 2 figs
Journal
[en] Studies of characteristics of back-scattered electron flux are carried out. Spectra of electrons reflected from the palladium specimen within 4-32 keV energy range are presented. Electron spectra in case of electron reflection from the aluminium and the copper specimens at normal incidence with 135 deg angle scattering at 4, 8, 32 keV energy, are given, as well
Journal
[en] The process of erosion is studied for layered surfaces of multicomponent structure materials under bombardment by light ions (H+, He+) with low energies (0.1-10 keV). A simple analytical expression is obtained for total coefficients of modified layer sputtering from a dissimilar substrate on the basis of the model of sputtering by an upward ion flow. The dependence of total sputtering coefficients on a layer thickness is revealed to be sharply nonmonotonic. The experiments are carried out using C and Al films on W substrates. Numerical investigation of a sputtering process is performed on the basis of statistical simulation by the Monte-Carlo method. The simulation results agree satisfactorily with the experimental data
[ru]
Исследован процесс эрозии слоистой поверхности многокомпонентных конструкционных материалов при бомбардировке легкими ионами (H+, He+) с малыми энергиями (0.1-10 кэВ). Получено простое аналитическое выражение для полных коэффициентов распыления модифицированного слоя с инородной подложки в модели распыления восходящим потоком ионов. Обнаружена резко немонотонная зависимость полных коэффициентов распыления от толщины слоя. Экспериментальные исследования проведены для пленок С и Al на W. Численное исследование процесса распыления выполнено на основе статистического моделирования методом Монте-Карло. Результаты численного моделирования удовлетворительно согласуются с экспериментальными даннымиJournal
Poverkhnost'. Rentgenovskie, Sinkhrotronnye i Nejtronnye Issledovaniya; ISSN 1028-0960; ; (no.4); p. 12-21
; (no.4); p. 12-21
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