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AbstractAbstract
[en] Ultra high resolution three dimensional images of a microscopic test object were made with soft x-rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows which were separated by ∼ 5μm. Depth resolution comparable to the transverse resolution was achieved by recording nine 2-D images of the object at angles between -50 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image using an algebraic reconstruction technique (ART) algorithm. We observed a transverse resolution of ∼1000 A. Artifacts in the reconstruction limited the overall depth resolution to ∼6000 A, however some features were clearly reconstructed with a depth resolution of ∼1000 A
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4. international colloquium: X-ray lasers 1994; Williamsburg, VA (United States); 15-20 May 1994; CONTRACT W-7405ENG-48; W-3110-ENG-38; AC03-76SF00098; (c) 1994 American Institute of Physics.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
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