[en] Adherent Cu films were electrodeposited onto polycrystalline W foils from purged solutions of 0.05 M CuSO₄ in H₂SO₄ supporting electrolyte and 0.025 M CuCO₃Cu(OH)₂ in 0.32 M H₃BO₃ and corresponding HBF₄ supporting electrolyte, both at pH 1. Films were deposited under constant potential conditions at voltages between -0.6 V and -0.2 V vs. Ag/AgCl. All films produced by pulses of 10 s duration were visible to the eye; copper colored, and survived the Scotch tape test. Characterization by scanning electron microscopy (SEM)/energy dispersive X-ray analysis (EDX) and X-ray photoelectron spectroscopy (XPS) confirmed the presence of metallic Cu, with apparent dendritic growth. No sulfur impurity was observable by XPS or EDX. Kinetics measurements indicate that the Cu nucleation process in the sulfuric bath is slower than in the borate bath. In both baths, nucleation kinetics does not correspond to either instantaneous or progressive nucleation. Films deposited from 0.05 M CuSO₄/H₂SO₄ solution at pH>1 at -0.2 V exhibited poor adhesion and decreased Cu reduction current. In both borate and sulfate baths, small Cu nuclei are observable by SEM upon deposition at higher negative overpotentials, while only large nuclei (approx. 1 μm or larger) are observed upon deposition at less negative potentials

[en] Cyclic voltammetry, current-time-transient measurements, and X-ray photoelectron spectroscopy (XPS) have been used to study the nucleation behavior of electrochemically deposited Cu films on Ru substrates as a function of Ru pre-treatment. Pre-treatment consisted of cathodic polarization in either 1 M H₂SO₄ or in 1 M H₂SO₄ + 1 mM KI, followed by sample emersion and placement in a 1 M H₂SO₄ + 50 mM CuSO₄ plating bath. XPS measurements confirmed the presence of adsorbed I on the Ru surface following pre-treatment in the KI/H₂SO₄ solution. Cyclic voltammogram (CV) data for electrodes either as-received or pre-reduced in H₂SO₄ and then immersed in the plating solution exhibited a broad peak in the overpotential region consistent with oxide reduction followed by Cu deposition. No underpotential deposition (UPD) feature was observed for these electrodes. In contrast, the sample pre-reduced in I-containing electrolyte exhibited a narrow Cu deposition peak in the overpotential region and a UPD Cu feature centered at 80 mV vs. Ag/AgCl. Current-time-transient (CTT) measurements of Cu deposition on as-received electrodes or electrodes pre-reduced in I-free solution exhibited potential-independent kinetics that are not well described by either progressive or instantaneous nucleation models and which at long times indicate a combination of diffusion and kinetic control. In contrast, CTT measurements of deposition kinetics for samples reduced in I-containing electrolyte exhibited complex, potential-dependent behavior and that at long times indicates diffusion control. XPS results also indicated that the iodine adlayer on Ru reduced in I-containing electrolyte is stable upon polarization to at least -200 mV vs. Ag/AgCl. These data indicate that a protective I adlayer may be deposited on an air-exposed Ru electrode as the oxide surface is electrochemically reduced, and that this layer will inhibit reformation of an oxide during the Cu electroplating process. Therefore, electrochemical pre-treatment in I-containing electrolyte may be of practical utility under industrial conditions for Cu electroplating.