[en] The parallel plate dielectric resonator was applied to surface resistance (R_s) measurement of high temperature superconducting films with small area for the purpose of material research in early stage. Using 38 GHz resonance of TE₀₁₃ mode, available measurement area in the film was diameter of 9 mm. From the theoretical calculation, the measurement at higher frequency had an advantage of less error in R_s that is caused by dielectric loss tangent (tanδ). The effect of dielectric loss is negligible at 38 GHz even using a sapphire with order of 10^-7 of tanδ. In lower R_s region, R_s values of YBa₂Cu₃O_y that were measured at 38 GHz agreed well with that of standard measurement method at 22 GHz. However the difference of R_s between two methods became larger with increase of R_s. It is owing to poor signal to noise ratio at higher frequency