[en] The characteristics of a high-current impulse magnetron discharge have been studied during the reactive sputter deposition of Al in Ar/O₂ gas mixture. The dependence of deposition rate on oxygen content in the gas mixture has been measured for different power management regimes. The specific deposition rate values have been obtained for different ratios of on/off times

[en] Impulse magnetron discharge (pulse duration 20 ms) with uncooled Cr target has been investigated with a specially designed Langmuir probe setup in a wide range of parameters (magnetic field and discharge power). The spatial distributions of electron temperature and plasma density have been measured in the gasless self-sputtering mode. It has been shown that in the gasless high-power pulsed discharge with hot Cr target, plasma density is as high as 5 × 10¹⁸ m⁻³ at a pulsed power density of 1430 W/cm², while the electron temperature drops to values below 1 eV.

[en] The integral electrical characteristics of a pulsed magnetron discharge with a hot cathode with targets made of Cr, Cu, and Si have been measured. The phase trajectories of the discharge development in the voltage – current coordinates are constructed. Based on the results obtained, the modes of stable existence of a pulsed discharge with a hot target without transition to an arc shape are determined

[en] We studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250–2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N₂ radiofrequency discharge was determined.