[en] Electro-beam-induced-current, electron diffraction and X-ray electroprobe have been employed to study the initial stages of growth of CdTe films vacuum. The presence of inhomogeneity in the conduction can be explained by considering the deviation from stoichiometry for film samples prepared by sublimation of CdTe. Initially the film are tellurium-rich and p-type. Later a cadmium-rich layer which is n-type may be deposited onto the initial layer. Thes may lead to a change in the conduction type with the film thickness