[en] The measurement system reported here is intended for use in determining the current density distribution of electron beams from Pierce guns for use in TWTs. The system was designed to automatically scan the cross section of the electron beam and collect the high-resolution data with a Faraday cup probe mounted on a multistage manipulator using the LabVIEW program. A 0.06 mm thick molybdenum plate with a pinhole and a Faraday cup mounted as a probe assembly was employed to sample the electron beam current with 0.5 µm space resolution. The thermal analysis of the probe with pulse beam heating was discussed. A 0.45 µP electron gun with the expected minimum beam radius 0.42 mm was measured and the three-dimensional current density distribution, beam envelope and phase space were presented. (paper)