[en] The high-resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R ~ 100,000) instrument operating in the 25–122 μm spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy in 2019. Central to HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8 × 16 detector high-resolution array and a 64 × 16 detector low-resolution array. Both types of detectors consist of Mo/Au TES fabricated on leg-isolated Si membranes. Whereas the high-resolution detectors, with a noise equivalent power (NEP) ~ 1.5 × 10⁻¹⁸ W/rt (Hz), are fabricated on 0.45 μm Si substrates, the low-resolution detectors, with NEP ~ 1.0 × 10⁻¹⁷ W/rt (Hz), are fabricated on 1.40 μm Si. Here, we discuss the similarities and differences in the fabrication methodologies used to realize the two types of detectors.

[en] The high-resolution mid-infrared spectrometer (HIRMES) under development for Stratospheric Observatory for Infrared Astronomy is an instrument operating in the 25–122 μm spectral range with a spectral resolution R = Δλ/λ ~ 100,000 and has two absorber-coupled transition edge sensor bolometric detector focal planes. We have developed novel NbTiN low-stress absorber coatings which have the required optical impedance across the HIRMES operating band. The low intrinsic stress of these coatings allow for a peak-to-valley corrugation amplitude < 5 μm of the 450 nm thick, 1.4 mm × 1.7 mm detector pixels. Furthermore, these coatings have a superconducting transition temperature ~ 10 K, which allows them to simultaneously serve as an absorber in the desired signal band and a rejection filter at long wavelengths. This attribute makes them especially attractive for ultrasensitive absorber-coupled bolometric detector applications, because it helps in controlling the optical loading from out-of-band radiation. We also discuss a novel method for integrating a wedged-reflective absorber termination to the detector array.