[en] This paper reports the design, fabrication and testing of an energy scavenger that generates power from the wing motion of a Green June Beetle (Cotinis nitida) during its tethered flight. The generator utilizes non-resonant piezoelectric bimorphs operated in the d_3_1 bending mode to convert mechanical vibrations of a beetle into electrical output. The available deflection, force, and power output from oscillatory movements at different locations on a beetle are measured with a meso-scale piezoelectric beam. This way, the optimum location to scavenge energy is determined, and up to ∼115 µW total power is generated from body movements. Two initial generator prototypes were fabricated, mounted on a beetle, and harvested 11.5 and 7.5 µW in device volumes of 11.0 and 5.6 mm"3, respectively, from 85 to 100 Hz wing strokes during the beetle's tethered flight. A spiral generator was designed to maximize the power output by employing a compliant structure in a limited area. The necessary technology needed to fabricate this prototype was developed, including a process to machine high-aspect ratio devices from bulk piezoelectric substrates with minimum damage to the material using a femto-second laser. The fabricated lightweight spiral generators produced 18.5–22.5 µW on a bench-top test setup mimicking beetles' wing strokes. Placing two generators (one on each wing) can result in more than 45 µW of power per insect. A direct connection between the generator and the flight muscles of the insect is expected to increase the final power output by one order of magnitude

[en] This paper presents the analysis and preliminary design, fabrication, and measurement for mechanical vibration-isolation platforms especially designed for resonating MEMS devices including gyroscopes. Important parameters for designing isolation platforms are specified and the first platform (in designs with cascaded multiple platforms) is crucial for improving vibration-isolation performance and minimizing side-effects on integrated gyroscopes. This isolation platform, made from a thick silicon wafer substrate for an environment-resistant MEMS package, incorporates the functionalities of a previous design including vacuum packaging and thermal resistance with no additional resources. This platform consists of platform mass, isolation beams, vertical feedthroughs, and bonding pads. Two isolation platform designs follow from two isolation beam designs: lateral clamped–clamped beams and vertical torsion beams. The beams function simultaneously as mechanical springs and electrical interconnects. The vibration-isolation platform can yield a multi-dimensional, high-order mechanical low pass filter. The isolation platform possesses eight interconnects within a 12.2 × 12.2 mm² footprint. The contact resistance ranges from 4–11 Ω depending on the beam design. Vibration measurements using a laser-Doppler vibrometer demonstrate that the lateral vibration-isolation platform suppresses external vibration having frequencies exceeding 2.1 kHz.