Berger, S.; Quoizola, S.; Fave, A.; Kaminski, A.; Perichon, S.; Barbier, D.; Laugier, A.
Abstracts of 6. Polish Conference on Crystal Growth2001
Abstracts of 6. Polish Conference on Crystal Growth2001
AbstractAbstract
No abstract available
Source
Faculty of Technical Physics, Poznan University of Technology, Poznan (Poland); Faculty of Physics, Adam Mickiewicz University, Poznan (Poland); Polish Society for Crystal Growth (Poland); 120 p; 2001; p. 90; 6. Polish Conference on Crystal Growth; Poznan (Poland); 20-23 May 2001; Available at Institute of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw (PL)
Record Type
Miscellaneous
Literature Type
Conference
Country of publication
Reference NumberReference Number
Related RecordRelated Record
INIS VolumeINIS Volume
INIS IssueINIS Issue
AbstractAbstract
[en] The aim of this experiment is to grow a thin silicon layer (<50μm) by liquid phase epitaxy (LPE) onto porous silicon. This one acts as a sacrificial layer in order to transfer the 50 μm epitaxial layer onto foreign substrates like ceramics. After transfer, the silicon wafer is then re-usable. In this work, we used the following procedure : the porous silicon formation by HF anodisation on (100) or (111) Si wafers is realised in first step, followed by an eventual annealing in H2 atmosphere, and finally LPE silicon growth with different temperature profiles in order to obtain a silicon layer on the sacrificial porous silicon (p-Si). We observed a pyramidal growth on the surface of the (100) porous silicon but the coalescence was difficult to obtain. However, on a p-Si (111) oriented wafer, homogeneous layers were obtained. (orig.)
Primary Subject
Secondary Subject
Source
6. Polish conference on crystal growth; Poznan (Poland); 20-23 May 2001
Record Type
Journal Article
Literature Type
Conference
Journal
Country of publication
CHEMICAL COATING, CORROSION PROTECTION, CRYSTAL GROWTH METHODS, DEPOSITION, DIMENSIONS, DIRECT ENERGY CONVERTERS, ELECTROCHEMICAL COATING, ELECTROLYSIS, ELECTRON MICROSCOPY, ELEMENTS, EPITAXY, FILMS, HEAT TREATMENTS, LYSIS, MATERIALS, MICROSCOPY, NONMETALS, PHOTOELECTRIC CELLS, SEMIMETALS, SURFACE COATING
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue