[en] Most of the modern vacuum nanotechnological and research equipment is associated with the vibration control systems. Recently, systems based on composite materials, such as magnetorheological elastomers, are becoming more widely used. Such materials make possible to combine the functions of active, semi-active and passive vibration control in one device. This paper presents a research on the position error of the vibration control platform based on magnetorheological elastomers. This error occurs due to the inevitable unevenness of the top panel of the platform caused by the special properties of the elastomeric actuator. It leads to deviation of the platform from the horizontal plane position. The research on the measurement error was made by the contour estimations method and the correlation coefficients of the actuators movements were used. (paper)