Kvasov, N.T.; Shilina, S.Yu.
Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals1989
Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals1989
AbstractAbstract
[en] Short note. 1 fig
Original Title
Relaksatsionnye protsessy v legirovannom kremnii pri razlichnykh vidakh termicheskoj obrabotki
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AN SSSR, Moscow (USSR); Moskovskij Gosudarstvennyj Univ., Moscow (USSR); Moskovskij Gosudarstvennyj Univ., Moscow (USSR). Nauchno-Issledovatel'skij Inst. Yadernoj Fiziki; 192 p; 1989; p. 184; 19. All-union conference on physics of charged particles interaction with crystals; Moscow (USSR); 29-31 May 1989
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Kvasov, N.T.; Yarashyunas, K.Yu.; Spizhuk, O.F.; Shilina, S.Yu.
Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals1989
Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals1989
AbstractAbstract
[en] Short note
Original Title
O zakonomernosti raspredeleniya strukturnykh narushenij v antimonide indiya za predelami zony tormozheniya ionov pri ionnoj implantatsii bora
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Source
AN SSSR, Moscow (USSR); Moskovskij Gosudarstvennyj Univ., Moscow (USSR); Moskovskij Gosudarstvennyj Univ., Moscow (USSR). Nauchno-Issledovatel'skij Inst. Yadernoj Fiziki; 192 p; 1989; p. 183; 19. All-union conference on physics of charged particles interaction with crystals; Moscow (USSR); 29-31 May 1989
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AbstractAbstract
[en] It was established experimentally qualitative correspondance of defect concentration profile out of ion retardation zone and pressure profile of elastic waves exited by interaction accelerated ions with crystal. The amount of generated defects is in proportion to inherent crystal defects
Original Title
O zakonomernosti raspredeleniya strukturnykh narushenij v poluprovodnikakh za predelami zony tormozheniya ionov pri ionnoj implantatsii
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Journal Article
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