[en] The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.

[en] The n-type and p-type a-GaN films were successfully grown on a r-sapphire substrate, according to X-ray diffractometer and SEM results parameters measurement. The growth rate versus the growth temperature was investigated. The holes concentration (8x10¹⁷ cm⁻³) was achieved by the Cp₂Mg flow optimization and the parameters of thermal annealing in nitrogen. The GaN film growth rate dependence versus temperature at a constant hydrogen flow through a TEG source was investigated. The results indicate that defects density is reduced upto 10⁴ cm⁻², the surface morphology uniformity was improved. During growth the influence from V/III flows ratio was detected. (paper)

[en] In this paper results of the impulse laser processing impact on structural parameters and mechanical properties of coatings based on nitrides of niobium, titanium, zirconium and aluminum are set out. Structures of multilayer coatings are suggested and the utilization efficiency of carbide-tipped tools with engineered coatings is shown. (paper)