[en] The detection of low-energy charged particles, like secondary electrons, emitted from surface regions during particle bombardment is an applicable beam detection technique which is used in scanned ion microbeam arrangements. With regard to this technique, basic detection systems for such generated particles, their working principles and typical parameters are reviewed. The performance of the different detection systems has to be compared by a special criterion deduced from the shot noise of the primary beam and of the detection process. Discussed are the sensitivity, frequency response, gain stability and limitations of use which result from the operation and load capacity of secondary electron or ion detectors in vacuum systems. Low energy charged particles (0 - 1 keV) do not penetrate the entrance window of semiconductor or scintillation detectors conventionally used for charged particle detection in the keV of MeV energy range. Therefore, the classes of special devices must be used, namely windowless secondary electron multipliers, and semiconductor or scintillation detectors complemented by a strong electric field post-accelerating these particles to acceptable energies. An alternative to these devices, the charge collection with the Faraday cup, is also described. (author)
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